A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array
نویسندگان
چکیده
منابع مشابه
Flexure Design for a High-Speed Large-Range Tip-Tilt-Piston Micro- mirror Array
INTRODUCTION The aim of this paper is to introduce the flexure topology of a new, high fill-factor (99%) micromirror array (10,000 1mm 2 mirrors) that can achieve continuous, closed-loop control of three degrees of freedom (DOFs)—tip, tilt, and piston—over large ranges (>±10 o rotation and >±30μm translation) at high speeds (10’s of kHz). The flexure topology of this array was designed using th...
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1 These are both first authors as their contributions to this paper are equal INTRODUCTION This paper presents a new method for the modeling and optimization of actuator performance in a high fill-factor (99%) micromirror array (10,000 1mm 2 mirrors). The high torque output resulting from the optimization enables the mirrors to be driven with three degrees of freedom (DOFs)—tip, tilt, and pisto...
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NAOS (Nasmyth Adaptive Optics System) is the adaptive optics system presently developed for the ESO VLT. The field selectors are to feed the NAOS wavefront sensor with the light coming from an appropriate reference source which can be up to 1 arcmin (on the sky) distant from the center of the field of view. A large input tip-tilt-piston mirror selects the required part of the field of view. A s...
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Jason B. Stewart a,∗, Thomas G. Bifano b,c, Steven Cornelissen c, Paul Bierden c, B. Martin Levine d, Timothy Cook e a Department of Electrical and Computer Engineering, Boston University, Boston, MA, United States b Department of Manufacturing Engineering, Boston University, Boston, MA, United States c Boston Micromachines Corporation, Watertown, MA, United States d Jet Propulsion Laboratory, ...
متن کاملDesign and development of a 329-segment tip-tilt piston mirror array for space-based adaptive optics
We report on the development of a new MEMS deformable mirror (DM) system for the hyper-contrast visible nulling coronagraph architecture designed by the Jet Propulsion Laboratory for NASA’s Terrestrial Planet Finding (TPF) mission. The new DM is based largely upon existing lightweight, low power MEMS DM technology at Boston University (BU), tailored to the rigorous optical and mechanical requir...
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ژورنال
عنوان ژورنال: Journal of Microelectromechanical Systems
سال: 2017
ISSN: 1057-7157,1941-0158
DOI: 10.1109/jmems.2016.2628723